Nanoimprint Lithography: An Enabling Process for Nanofabrication

Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It provides the exciting, multidisciplinary field, offering a wide range of topics covering: principles, process, material and application. This book would be of specific interest for researchers and graduate students in the field of nanoscience, nanotechnology and nanofabrication, material, physical, chemical, electric engineering and biology. Dr. Weimin Zhou is an associate professor at Shanghai Nanotechnology Promotion Center, China.

著者

Zhou, Weimin

出版社

Springer-Verlag Berlin and Heidelberg GmbH & Co. K

発売日

2012-12-31

価格

価格未定（税込・書誌情報提供：openBD）

ISBN

9783642344275

ページ数

200ページ

発売済み